IC-processed electrostatic micromotors

Sensors and Actuators

Volumn 20, Issue 1-2, 1989, Pages 41-47

  Fan, Long Shen ^a   Tai, Yu Chong ^a   Muller, Richard S ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRIC MOTORS, SYNCHRONOUS; ELECTROSTATIC DEVICES; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICES;

ELECTROSTATIC MOTORS; MICROACTUATORS; MICROMECHANICAL DEVICES; MICROMOTORS;

ELECTRIC MOTORS, STEPPING TYPE;

EID: 0024767122     PISSN: 02506874     EISSN: None     Source Type: Journal    
DOI: 10.1016/0250-6874(89)87100-8     Document Type: Article

References (6)

1. Design considerations for a practical electrostatic micromotor
2. Design considerations for microfabricated electric actuators
3. IC-processed electrostatic micromotors
4. Pin-joints, springs, cranks, gears and other novel micromechanical structures
5. Integrated movable micromechanical structures for sensors and actuators
6. IC-Processed micromotors: design, technology, and testing