An ultrasonic micromotor using a bending cylindrical transducer based on PZT thin film

"Sensors and Actuators, A: Physical"

Volumn 50, Issue 1-2, 1995, Pages 75-80

  Morita, Takeshi ^a   Kurosawa, Minoru ^a   Higuchi, Toshiro ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

Hydrothermal method; Lead zirconate titanate; Micromotors; Ultrasonic motors

Indexed keywords

ELECTRODES; LEAD COMPOUNDS; MACHINE VIBRATIONS; MOTORS; ROTORS; THIN FILMS; TITANIUM OXIDES;

HYDROTHERMAL METHOD; LEAD ZIRCONATE TITANATE; ULTRASONIC MICROMOTORS;

ULTRASONIC TRANSDUCERS;

EID: 0029349909     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(96)80087-2     Document Type: Article

References (9)

1. IC-processed electrostatic micromotors
2. Harmonic electrostatic motors
3. Piezoelectric micromotors for microrobots
4. Hybrid ultrasonic micromachined motors
5. An ultrasonic motor using bending vibration of a short cylinder
6. A designing method of a bar-type ultrasonic motor for autofocus lenses
7. Acoustic lenses employing PZT thin film transducers
8. Preparation of lead zirconate titanate thin film by hydrothermal method