Piezoelectric micromotors for microrobots

Ultrasonics Symposium Proceedings

Volumn 3, Issue , 1990, Pages 1163-1172

  Flynn, Anita M ^a   Tavrow, Lee S ^a   Bart, Stephen F ^a   Brooks, Rodney A ^a   Ehrlich, Daniel J ^a   Udayakumar, K R ^a   Cross, L Eric ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC MOTORS; ELECTROMECHANICAL DEVICES - MICROELECTROMECHANICAL; FERROELECTRIC MATERIALS - THIN FILMS; ROBOTS - ELECTRIC DRIVE;

FERROELECTRIC THIN FILMS; MICROMECHANICS; MICROROBOTS; PIEZOELECTRIC MICROMOTORS;

PIEZOELECTRIC DEVICES;

EID: 0025575076     PISSN: 00905607     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (28)