(Nd,Tb)-Fe-B thin film magnets prepared by magnetron sputtering

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 244-249

  Araki, T ^a   Okabe, M ^a  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION DEPENDENCE; ENERGY PRODUCT; MAGNETIC ROTORS; MICROELECTROMAGNETIC DEVICES; MICROMOTORS;

COMPOSITION; COMPOSITION EFFECTS; FILM PREPARATION; MAGNETIC ANISOTROPY; MAGNETIC PROPERTIES; MAGNETIZATION; MAGNETRON SPUTTERING; NEODYMIUM COMPOUNDS; ROTORS; SPUTTER DEPOSITION;

MAGNETIC THIN FILMS;

EID: 0029753178     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)