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Diamond and Related Materials

Volumn 7, Issue 8, 1998, Pages 1219-1226

Extended model for stress-induced formation of c-BN in ion-assisted deposition

(2) Klotzbucher, T a Kreutz, E W a

a RWTH AACHEN UNIVERSITY (Germany)

Author keywords

Cubic boron nitride; Ion bombardment; Momentum transfer; Stress

Indexed keywords

CERAMIC COATINGS; COMPRESSIVE STRESS; FILM GROWTH; ION BOMBARDMENT; MATHEMATICAL MODELS;

ION ASSISTED DEPOSITION; MOMENTUM TRANSFER;

CUBIC BORON NITRIDE;

EID: 0032141787 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/s0925-9635(98)00184-8 Document Type: Article

Times cited : (7)

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