SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Diamond and Related Materials

Volumn 6, Issue 5-7, 1997, Pages 599-603

C-BN thin film formation in a hybrid r.f.-PLD technique

(4) Klotzbucher T a Mergens, M a Wesner, D A b Kreutz, E W a

a RWTH AACHEN UNIVERSITY (Germany)

b FRAUNHOFER INSTITUTE FOR LASER TECHNOLOGY (Germany)

Author keywords

Cubic boron nitride; FTIR spectroscopy; Hybrid r.f. PLD technique; Raman spectroscopy

Indexed keywords

EID: 0041875872 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/s0925-9635(96)00612-7 Document Type: Article

Times cited : (11)

References (23)

1
- 0042109551
- J. Faust (ed.), Springer, Berlin
- A. Meller, in J. Faust (ed.), Gmelin Handbook of Inorganic and Organometallic Chemistry, Springer, Berlin, 1989, p. 58.
- (1989) Gmelin Handbook of Inorganic and Organometallic Chemistry , pp. 58
- Meller, A.¹

2
- 36448999062
- D.J. Kester and R. Messier, J. Appl. Phys., 72 (1992) 504.
- (1992) J. Appl. Phys. , vol.72 , pp. 504
- Kester, D.J.¹ Messier, R.²

3
- 0028463481
- D.L. Medlin, T.A. Friedmann, P.B. Mirkarimi, P. Rez, M.J. Mills and K.F. McCarty, J. Appl. Phys., 76 (1994) 295.
- (1994) J. Appl. Phys. , vol.76 , pp. 295
- Medlin, D.L.¹ Friedmann, T.A.² Mirkarimi, P.B.³ Rez, P.⁴ Mills, M.J.⁵ McCarty, K.F.⁶

4
- 0028514659
- T.A. Friedmann, P.B. Mirkarimi, D.L. Medlin, K.F. McCarty, E.J. Klaus, D.R. Boehme, H.A. Johnsen, M.J. Mills, D.K. Ottesen and J.C. Barbour, J. Appl. Phys., 76 (1994) 3088.
- (1994) J. Appl. Phys. , vol.76 , pp. 3088
- Friedmann, T.A.¹ Mirkarimi, P.B.² Medlin, D.L.³ McCarty, K.F.⁴ Klaus, E.J.⁵ Boehme, D.R.⁶ Johnsen, H.A.⁷ Mills, M.J.⁸ Ottesen, D.K.⁹ Barbour, J.C.¹⁰

5
- 0029208056
- W. Dworschak, K. Jung and H. Erhardt, Thin Solid Films 254 (1995) 65.
- (1995) Thin Solid Films , vol.254 , pp. 65
- Dworschak, W.¹ Jung, K.² Erhardt, H.³

6
- 0000043758
- M. Kuhr, S. Reinke and W. Kulisch, Diamond Relat. Mater., 4 (1995) 375.
- (1995) Diamond Relat. Mater. , vol.4 , pp. 375
- Kuhr, M.¹ Reinke, S.² Kulisch, W.³

7
- 0041608650
- J. Hahn, M. Friedrich, R. Pintaske, M. Schaller, N. Kahl, D.R.T. Zahn and F. Richter, Diamond Relat. Mater., 5 (1996) 113.
- (1996) Diamond Relat. Mater. , vol.5 , pp. 113
- Hahn, J.¹ Friedrich, M.² Pintaske, R.³ Schaller, M.⁴ Kahl, N.⁵ Zahn, D.R.T.⁶ Richter, F.⁷

8
- 0029252956
- T. Klotzbücher, W. Pfleging, M. Mertin, D.A. Wesner and E.W. Kreutz, Appl. Surf. Sci., 86 (1995) 165.
- (1995) Appl. Surf. Sci. , vol.86 , pp. 165
- Klotzbücher, T.¹ Pfleging, W.² Mertin, M.³ Wesner, D.A.⁴ Kreutz, E.W.⁵

9
- 0001630786
- W. Pfleging, T. Klotzbücher, D.A. Wesner and E.W. Kreutz, Diamond Relat. Mater., 4 (1995) 370.
- (1995) Diamond Relat. Mater. , vol.4 , pp. 370
- Pfleging, W.¹ Klotzbücher, T.² Wesner, D.A.³ Kreutz, E.W.⁴

10
- 0000018973
- T.A. Friedmann, K.F. McCarty, E.J. Klaus, D. Boehme, W.M. Clift, H.A. Johnson, M.J. Mills and D.K. Ottesen, Appl. Phys. Lett., 61 (1992) 2406.
- (1992) Appl. Phys. Lett. , vol.61 , pp. 2406
- Friedmann, T.A.¹ McCarty, K.F.² Klaus, E.J.³ Boehme, D.⁴ Clift, W.M.⁵ Johnson, H.A.⁶ Mills, M.J.⁷ Ottesen, D.K.⁸

11
- 0039620091
- T. Klotzbücher, W. Pfleging, D.A. Wesner, M. Mergens and E.W. Kreutz, Diamond Relat. Mater., 5 (1996) 525.
- (1996) Diamond Relat. Mater. , vol.5 , pp. 525
- Klotzbücher, T.¹ Pfleging, W.² Wesner, D.A.³ Mergens, M.⁴ Kreutz, E.W.⁵

12
- 0003400638
- John Wiley & Sons, New York
- B. Chapman, Glow Discharge Processes, John Wiley & Sons, New York, 1980, p. 69.
- (1980) Glow Discharge Processes , pp. 69
- Chapman, B.¹

13
- 4243316728
- in press
- T. Klotzbücher, M. Scherge, M. Mergens, D.A. Wesner and E.W. Kreutz, Surf. Coat. Technol., in press.
- Surf. Coat. Technol.
- Klotzbücher, T.¹ Scherge, M.² Mergens, M.³ Wesner, D.A.⁴ Kreutz, E.W.⁵

14
- 0000036569
- S. Reinke, M. Kuhr, W. Kulisch and R. Kassing, Diamond Relat. Mater., 4 (1995) 272.
- (1995) Diamond Relat. Mater. , vol.4 , pp. 272
- Reinke, S.¹ Kuhr, M.² Kulisch, W.³ Kassing, R.⁴

15
- 36449001598
- C. Wild and P. Koidl, J. Appl. Phys., 69 (1991) 2909.
- (1991) J. Appl. Phys. , vol.69 , pp. 2909
- Wild, C.¹ Koidl, P.²

16
- 84955030294
- O. Tsuda, Y. Yamada, T. Fujii and T. Yoshida, J. Vac. Sci. Technol., 13 (1995) 2843.
- (1995) J. Vac. Sci. Technol. , vol.13 , pp. 2843
- Tsuda, O.¹ Yamada, Y.² Fujii, T.³ Yoshida, T.⁴

17
- 0028413117
- D.J. Kester, K.S. Ailey and R.F. Davis, Diamond Relat. Mater., 3 (1994) 332.
- (1994) Diamond Relat. Mater. , vol.3 , pp. 332
- Kester, D.J.¹ Ailey, K.S.² Davis, R.F.³

18
- 0342942816
- J.A. Sanjuro, E. Lopez-Cruz, P. Vogl and M. Cardona, Phys. Rev. B, 28 (1983) 4579.
- (1983) Phys. Rev. B , vol.28 , pp. 4579
- Sanjuro, J.A.¹ Lopez-Cruz, E.² Vogl, P.³ Cardona, M.⁴

19
- 84953681979
- H. Windischmann, J. Vac. Sci. Technol., 9 (1991) 2431.
- (1991) J. Vac. Sci. Technol. , vol.9 , pp. 2431
- Windischmann, H.¹

20
- 0028543108
- P.B. Mirkarimi, K.F. McCarty, D.L. Medlin, W.G. Wolfer, T.A. Friedmann, E.J. Klaus, G.F. Cardinale and D.G. Howitt, J. Mater. Res., 9 (1994) 2925.
- (1994) J. Mater. Res. , vol.9 , pp. 2925
- Mirkarimi, P.B.¹ McCarty, K.F.² Medlin, D.L.³ Wolfer, W.G.⁴ Friedmann, T.A.⁵ Klaus, E.J.⁶ Cardinale, G.F.⁷ Howitt, D.G.⁸

21
- 0030547577
- P.B. Mirkarimi, K.F. McCarty, G.F. Cardinale, D.L. Medlin, D.K. Ottesen and H.A. Johnsen, J. Vac. Sci. Technol., 14 (1996) 251.
- (1996) J. Vac. Sci. Technol. , vol.14 , pp. 251
- Mirkarimi, P.B.¹ McCarty, K.F.² Cardinale, G.F.³ Medlin, D.L.⁴ Ottesen, D.K.⁵ Johnsen, H.A.⁶

22
- 0027578647
- C.A. Davis, Thin Solid Films, 226 (1993) 30.
- (1993) Thin Solid Films , vol.226 , pp. 30
- Davis, C.A.¹

23
- 33746621208
- R.J. Nemanich, S.A. Solin and R.M. Martin, Phys. Rev. B, 23 (1981) 6348.
- (1981) Phys. Rev. B , vol.23 , pp. 6348
- Nemanich, R.J.¹ Solin, S.A.² Martin, R.M.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.