Pulsing a low pressure radiofrequency discharge

JSME International Journal, Series B: Fluids and Thermal Engineering

Volumn 41, Issue 2, 1998, Pages 424-428

  Smith, H B ^a   Charles, C ^a   Boswell, R W ^a   Kuwahara, H ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

Plasma breakdown; Pulsed RF discharge; Simulation

Indexed keywords

COMPUTER SIMULATION; ELECTRIC BREAKDOWN; PHYSICS; PLASMAS;

PULSED RADIOFREQUENCY DISCHARGE;

ELECTRIC DISCHARGES;

EID: 0032072268     PISSN: 13408054     EISSN: None     Source Type: Journal    
DOI: 10.1299/jsmeb.41.424     Document Type: Article

References (12)

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