Simulations of multipactor-assisted breakdown in radio frequency plasmas

Journal of Applied Physics

Volumn 80, Issue 8, 1996, Pages 4292-4298

  Vender, D ^a   Smith, H B ^b   Boswell, R W ^b  

^a DUBLIN CITY UNIVERSITY   (Ireland)

^b AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001580614     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.363389     Document Type: Article

References (27)

1. S. C. Brown, Introduction to Electrical Discharges in Gases (John Wiley & Sons, New York, 1966).
2. A. J. Hatch and H. B. Williams, J. Appl. Phys. 25, 417 (1954).
3. J. R. M. Vaughan, IEEE Trans. Electron Devices 35, 1172 (1988).
4. R. W. Boswell and D. Vender, Plasma Source Sci. Technol. 4, 534 (1995).
5. S. Samukawa and S. Furuoya, Appl. Phys. Lett. 63, 2044 (1993); R. W. Boswell and D. Henry, ibid. 47, 1095 (1985); L. J. Overzet, J. T. Verdeyen, and J. Beberman, J. Appl. Phys. 66, 1622 (1989); Y. Watanabe, M. Shinatami, Y. Kubo, I. Ogowa, and S. Ogi, Appl. Phys. Lett. 53, 1263 (1988); A. A. Howling, J. -L. Dorier, and Ch. Hollenstein, ibid. 62, 1341 (1993).
6. S. Samukawa and S. Furuoya, Appl. Phys. Lett. 63, 2044 (1993); R. W. Boswell and D. Henry, ibid. 47, 1095 (1985); L. J. Overzet, J. T. Verdeyen, and J. Beberman, J. Appl. Phys. 66, 1622 (1989); Y. Watanabe, M. Shinatami, Y. Kubo, I. Ogowa, and S. Ogi, Appl. Phys. Lett. 53, 1263 (1988); A. A. Howling, J. -L. Dorier, and Ch. Hollenstein, ibid. 62, 1341 (1993).
7. S. Samukawa and S. Furuoya, Appl. Phys. Lett. 63, 2044 (1993); R. W. Boswell and D. Henry, ibid. 47, 1095 (1985); L. J. Overzet, J. T. Verdeyen, and J. Beberman, J. Appl. Phys. 66, 1622 (1989); Y. Watanabe, M. Shinatami, Y. Kubo, I. Ogowa, and S. Ogi, Appl. Phys. Lett. 53, 1263 (1988); A. A. Howling, J. -L. Dorier, and Ch. Hollenstein, ibid. 62, 1341 (1993).
8. S. Samukawa and S. Furuoya, Appl. Phys. Lett. 63, 2044 (1993); R. W. Boswell and D. Henry, ibid. 47, 1095 (1985); L. J. Overzet, J. T. Verdeyen, and J. Beberman, J. Appl. Phys. 66, 1622 (1989); Y. Watanabe, M. Shinatami, Y. Kubo, I. Ogowa, and S. Ogi, Appl. Phys. Lett. 53, 1263 (1988); A. A. Howling, J. -L. Dorier, and Ch. Hollenstein, ibid. 62, 1341 (1993).
9. S. Samukawa and S. Furuoya, Appl. Phys. Lett. 63, 2044 (1993); R. W. Boswell and D. Henry, ibid. 47, 1095 (1985); L. J. Overzet, J. T. Verdeyen, and J. Beberman, J. Appl. Phys. 66, 1622 (1989); Y. Watanabe, M. Shinatami, Y. Kubo, I. Ogowa, and S. Ogi, Appl. Phys. Lett. 53, 1263 (1988); A. A. Howling, J. -L. Dorier, and Ch. Hollenstein, ibid. 62, 1341 (1993).
10. D. Vender and R. W. Boswell, IEEE Trans. Plasma Sci. 18, 725 (1990).
11. M. Surendra and D. B. Graves, IEEE Trans. Plasma Sci. 19, 144 (1991).
12. H. W. Trombley, F. L. Terry, Jr., M. E. Elta, IEEE Trans. Plasma Sci. 19, 158 (1991).
13. V. Vahedi, C. K. Birdsall, M. A. Lieberman, G. DiPeso, and T. D. Rognlien, Plasma Sources Sci. Technol. 2, 273 (1993).
14. R. W. Boswell and I. J. Morey, Appl. Phys. Lett. 52, 21 (1988).
15. H. B. Smith, Ph.D. thesis, Australian National University, Canberra, 1995.
16. C. K. Birdsell, IEEE Trans. Plasma Sci. 19, 65 (1991).
17. V. Vahedi, G. Dipeso, C. K. Birdsall, M. A. Lieberman, and T. D. Rognlien, Plasma Sources Sci. Technol. 2, 261 (1993).
18. J. P. Verboncoeur, M. V. Alves, V. Vahedi, and C. K. Birdsall, J. Comput. Phys. 104, 321 (1993).
19. H. Bruining, Physics and Applications of Secondary Electron Emission (Pergamon, London, 1954).
20. O. Hachenberg and W. Brauer, Adv. Electron. Electron Phys. 11, 413 (1959).
21. J. R. M. Vaughan, IEEE Trans. Electron Devices 36, 1963 (1989).
22. This approach conserves energy only in the time-averaged sense, but scaling studies confirm that the resulting energy loss is negligible.
23. A. Miller, H. B. Williams, and O. Theimer, J. Appl. Phys. 34, 1673 (1963); A. L. Gilardini, J. Appl. Phys. 78, 783 (1995).
24. A. Miller, H. B. Williams, and O. Theimer, J. Appl. Phys. 34, 1673 (1963); A. L. Gilardini, J. Appl. Phys. 78, 783 (1995).
25. See for example, Electron Impact Ionization, edited by T. D. Märk and G. H. Dunn (Springer, Vienna, 1985). A more sophisticated fitting to the measured cross section in argon is used in the simulation code.
26. A. J. Perry, D. Vender, and R. W. Boswell, J. Vac. Sci. Technol. B 9, 310 (1991).
27. G. Francis, Ionization Phenomena in Gases (Butterworths, London, 1960).