Modulated discharges: Effect on plasma parameters and deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 8, Issue 3, 1990, Pages 1851-1856

  Verdeyen, J T ^a   Beberman, J ^a   Overzet, L ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000730530     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.576815     Document Type: Article

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