Influence of different coil geometries on the spatial distribution of the plasma density in planar inductively coupled plasmas

Physical Review E - Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics

Volumn 56, Issue 5, 1997, Pages 5866-5875

  Schwabedissen, A ^a   Benck, E C ^a   Roberts, J R ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CARRIER CONCENTRATION; ELECTRIC COILS; ELECTRONS; EMISSION SPECTROSCOPY; GEOMETRY; PLASMA DENSITY; PROBES;

LANGMUIR PROBES; PLANAR INDUCTIVELY COUPLED PLASMAS;

PLASMAS;

EID: 0031270587     PISSN: 1063651X     EISSN: None     Source Type: Journal    
DOI: 10.1103/PhysRevE.56.5866     Document Type: Article

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