Statistical self-calibrating algorithm for phase-shift interferometry based on a smoothness assessment of the intensity offset map

Measurement Science and Technology

Volumn 9, Issue 9, 1998, Pages 1451-1455

  Dobroiu, Adrian ^a   Apostol, Dan ^a   Nascov, Victor ^a   Damian, Victor ^a  

^a NATIONAL INSTITUTE FOR LASER   (Romania)

Author keywords

Interferometry; Laser interferometer; Phase shift interferometry; Profilometry; Wavefront phase

Indexed keywords

ALGORITHMS; INTERFEROMETERS; LASER APPLICATIONS; PHASE SHIFT; STATISTICAL METHODS;

INTENSITY OFFSET MAPS; INTERFEROGRAMS; PROFILOMETRY;

INTERFEROMETRY;

EID: 0032166065     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/9/9/013     Document Type: Article

References (7)

1. Okada K, Sato A and Tsujiuchi J 1991 Simultaneous calculation of phase distribution and scanning phase shift in phase shifting interferometry Opt. Commun. 84 118-24
2. Farrell C T and Player M A 1992 Phase step measurement and variable step algorithms in phase-shifting interferometry Meas. Sci. Technol. 3 953-8
3. Farrell C T and Player M A 1994 Phase-step insensitive algorithms for phase-shifting interferometry Meas. Sci. Technol. 5 648-52
4. Han G-S and Kim S-W 1994 Numerical correction of reference phases in phase-shifting interferometry by iterative least-squares fitting Appl. Opt. 33 7321-5
5. Dobroiu A, Apostol D, Damian V and Nascov V 1997 Statistical self-calibrating algorithms for phase-shift interferometry Fringe '97 - Automatic Processing of Fringe Patterns (15-17 September 1997, Bremen) vol 3 (Bremen, Germany: Akademie) pp 129-31
6. Dobroiu A, Logofǎtu P C, Apostol D and Damian V 1997 Statistical self-calibrating algorithm for three-sample phase-shift interferometry Meas. Sci. Technol. 8 738-45
7. Dobroiu A, Apostol D, Nascov V and Damian V 1998 Self-calibrating algorithm for three-sample phase-shift interferometry by contrast levelling Meas. Sci. Technol. 9 744-50