메뉴 건너뛰기




Volumn 36, Issue 31, 1997, Pages 8098-8115

General methods for generating phase-shifting interferometry algorithms

Author keywords

Interferometry; Phase determining; Phase measuring; Phase shift

Indexed keywords


EID: 0000200320     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.36.008098     Document Type: Article
Times cited : (123)

References (15)
  • 1
    • 77956978378 scopus 로고
    • Phase measurement interferometry techniques
    • E. Wolf, ed.(Elsevier, New York, Chap
    • K. Creath, “Phase measurement interferometry techniques, ” inProgress in Optics, E. Wolf, ed.(Elsevier, New York, 1988), Vol. 26, Chap. 5, pp. 349-383.
    • (1988) InProgress in Optics , vol.26 , Issue.5 , pp. 349-383
    • Creath, K.1
  • 2
    • 0020133159 scopus 로고
    • Interferometrie optical metrology: Basic principles and new systems
    • May
    • J. C. Wyant, “Interferometrie optical metrology: basic principles and new systems, ” Laser Focus18, 65-71(May 1982).
    • (1982) Laser Focus , vol.18 , pp. 65-71
    • Wyant, J.C.1
  • 3
    • 77955701859 scopus 로고
    • Derivation of algorithms for phase-shifting interferometry using the concept of a data-sampling window
    • His values ofeandyfor -n/2 algorithms are, respectively, —n/2 and -n/16 times the values in this paper
    • P. de Groot, “Derivation of algorithms for phase-shifting interferometry using the concept of a data-sampling window, ” Appl. Opt.34, 4723-4730(1995). His values ofeandyfor -n/2 algorithms are, respectively, —n/2 and -n/16 times the values in this paper.
    • (1995) Appl. Opt , vol.34 , pp. 4723-4730
    • De Groot, P.1
  • 4
    • 84893997835 scopus 로고    scopus 로고
    • Design and assessment of symmetrical phase-shifting algorithms
    • K. G. Larkin and B. F. Oreb, “Design and assessment of symmetrical phase-shifting algorithms, ” J. Opt. Soc. Am. A9, 1740-1748(1992).
    • J. Opt. Soc. Am. A , vol.9 , pp. 1740-1748
    • Larkin, K.G.1    Oreb, B.F.2
  • 5
    • 84971649875 scopus 로고    scopus 로고
    • Fourier description of digital phase-shifting interferometry
    • K. Freischlad and C. L. Koliopoulos, “Fourier description of digital phase-shifting interferometry, ” J. Opt. Soc. Am. A7, 542-551(1990).
    • J. Opt. Soc. Am. A , vol.7 , pp. 542-551
    • Freischlad, K.1    Koliopoulos, C.L.2
  • 6
    • 0000026851 scopus 로고    scopus 로고
    • Phase extraction analysis of laser-diode phase-shifting interferometry that is insensitive to changes in laser power
    • Their formula for the phase has the form0 =tan 1(¥ bjIj/¥a), and their phase step is really —n-/2. For+w/2 phase step, letbj 3-bj
    • R. Onodera and Y. Ishii, “Phase extraction analysis of laser-diode phase-shifting interferometry that is insensitive to changes in laser power, ” J. Opt. Soc. Am. A13, 139-146(1996). Their formula for the phase has the form0 =tan1(¥ bjIj/¥a^), and their phase step is really —n-/2. For+w/2 phase step, letbj 3-bj.
    • (1996) J. Opt. Soc. Am. A , vol.13 , pp. 139-146
    • Onodera, R.1    Ishii, Y.2
  • 7
    • 84975635766 scopus 로고    scopus 로고
    • Least squares estimation in phase-measurement interferometry
    • C. J. Morgan, “Least squares estimation in phase-measurement interferometry, ” Opt. Lett.7, 368-370(1982).
    • Opt. Lett , vol.7 , pp. 368-370
    • Morgan, C.J.1
  • 8
    • 0001009145 scopus 로고    scopus 로고
    • Extended averaging technique for derivation of error-compensating algorithms in phase-shifting interferometry
    • J. Schmit and K. Creath, “Extended averaging technique for derivation of error-compensating algorithms in phase-shifting interferometry, ” Appl. Opt.34, 3610-3619(1995).
    • Appl. Opt , vol.34 , pp. 3610-3619
    • Schmit, J.1    Creath, K.2
  • 9
    • 0002128002 scopus 로고    scopus 로고
    • Design of algorithms for phase measurements by the use of phase-shifting
    • Y. Surrel, “Design of algorithms for phase measurements by the use of phase-shifting, ” Appl. Opt.35, 51-60(1996).
    • Appl. Opt , vol.35 , pp. 51-60
    • Surrel, Y.1
  • 10
    • 0020844269 scopus 로고    scopus 로고
    • Digitial wave-front measuring interferometry: Some systematic error sources
    • J. Schwider, R. Burow, K. E. Elssner, J. Grzanna, R. Spola-czyk, and K. Merkel, “Digitial wave-front measuring interferometry: some systematic error sources, ” Appl. Opt.22, 3421-3432(1983).
    • Appl. Opt , vol.22 , pp. 3421-3432
    • Schwider, J.1    Burow, R.2    Elssner, K.E.3    Grzanna, J.4    Spola-Czyk, R.5    Merkel, K.6
  • 11
    • 84928815585 scopus 로고    scopus 로고
    • Digital phase-shiftinginterferometry: A simple error-compensating phase calculation algorithm
    • P. Hariharan, B. F. Oreb, and T. Eiju, “Digital phase-shiftinginterferometry: a simple error-compensating phase calculation algorithm, ” Appl. Opt.26, 2504-2507(1987).
    • Appl. Opt , vol.26 , pp. 2504-2507
    • Hariharan, P.1    Oreb, B.F.2    Eiju, T.3
  • 12
    • 0029250206 scopus 로고    scopus 로고
    • Vibration in phase-shifting interferometry
    • P. de Groot, “Vibration in phase-shifting interferometry, ” J. Opt. Soc. Am. A12, 354-365(1995).
    • J. Opt. Soc. Am. A , vol.12 , pp. 354-365
    • De Groot, P.1
  • 13
    • 0021468528 scopus 로고    scopus 로고
    • Generalized data reduction for heterodyne interferometry
    • J. E. Grievenkamp, “Generalized data reduction for heterodyne interferometry, ” Opt. Eng.23, 350-352(1984).
    • Opt. Eng , vol.23 , pp. 350-352
    • Grievenkamp, J.E.1
  • 14
    • 84975609399 scopus 로고    scopus 로고
    • Phase shifting interferometry in the presenceof vibration: A new algorithm and system
    • P. Wizinowich, “Phase shifting interferometry in the presenceof vibration: a new algorithm and system, ” Appl. Opt.29, 3271-3279(1990).
    • Appl. Opt , vol.29 , pp. 3271-3279
    • Wizinowich, P.1
  • 15
    • 85010162610 scopus 로고    scopus 로고
    • Truax Associates, 189 Olson Drive
    • personal communication
    • B. Truax, Truax Associates, 189 Olson Drive, Southington, Conn. 06489(personal communication, 1997).
    • (1997) Southington, Conn. 06489
    • Truax, B.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.