Extreme ultraviolet interferometric measurements of diffraction-limited optics

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 6, 1999, Pages 2982-2986

  Goldberg, Kenneth A ^a   Naulleau, Patrick ^a   Bokor, Jeffrey ^a,b  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033267350     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590939     Document Type: Article

References (17)

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15. A. K. Ray-Chaudhuri (personal communication).
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