Accelerated phase-measuring algorithm of least squares for phase-shifting interferometry

Optical Engineering

Volumn 36, Issue 11, 1997, Pages 3101-3106

  Kim, Seung Woo ^a,b   Kang, Min Gu ^a   Han, Geon Soo ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b MRS Korea   (South Korea)

Author keywords

Least squares; Phase shift errors; Phase measuring algorithms; Phase shifting interferometry

Indexed keywords

EID: 0001357310     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.601546     Document Type: Article

References (8)

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