Susceptibility of systematic error-compensating algorithms to random noise in phase-shifting interferometry

Applied Optics

Volumn 36, Issue 10, 1997, Pages 2084-2093

  Hibino, Kenichi ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Phase measuring interferometry; Phase shift algorithm; Phase shift error; Random noise

Indexed keywords

EID: 0346663134     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.36.002084     Document Type: Article

References (19)

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