Recovery of multilayer-coated zerodur and ule optics for extreme-ultraviolet lithography by recoating, reactive-ion etching, and wet-chemical processes

Applied Optics

Volumn 40, Issue 1, 2001, Pages 62-70

  Mirkarimi, Paul B ^a   Baker, Sherry L ^a   Montcalm, Claude ^a   Folta, James A ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CORROSION; MULTILAYERS; REACTIVE ION ETCHING; SILICON; ULTRAVIOLET RADIATION;

RECOATING;

PHOTOLITHOGRAPHY;

EID: 0011066241     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.40.000062     Document Type: Article

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