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Volumn 69, Issue 7, 1999, Pages

High-speed etching of hexagonal GaN by laser ablation and successive chemical treatment

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[No Author keywords available]

Indexed keywords

EID: 0010686870 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s003390051406 Document Type: Article

Times cited : (16)

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