Analysis of B-SiO2 films by highly charged ion based time-of-flight secondary ion mass spectrometry, standard secondary ion mass spectrometry and elastic recoil detection

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 3, 1998, Pages 1384-1387

  Schenkel, T ^a   Hamza, A V ^a   Barnes, A V ^a   Schneider, D H ^a   Walsh, D S ^b   Doyle, B L ^b  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0007080286     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581523     Document Type: Article

References (29)

1. K. Wittmaack, in Inelastic Ion Solid Collisions, edited by N. H. Tolk J. C. Tully, W. Heiland, and C. W. White (Academic, New York, 1977), p. 153.
2. For a recent discussion see, L. A. Heimbrook, F. A. Baiocchi, T. C. Bitter, M. Geva, H. S. Luftman, and S. Nalahara, J. Vac. Sci. Tecnnol. B 14, 202 (1996); J. W. Erickson and R. Brigham, ibid. 14, 353 (1996).
3. For a recent discussion see, L. A. Heimbrook, F. A. Baiocchi, T. C. Bitter, M. Geva, H. S. Luftman, and S. Nalahara, J. Vac. Sci. Tecnnol. B 14, 202 (1996); J. W. Erickson and R. Brigham, ibid. 14, 353 (1996).
4. M. Haag, H. Gnaser, and H. Oechsner, Fresenius J. Anal. Chem. 353, 565 (1995).
5. H. F. Arlinghaus and C. F. Joyner, J. Vac. Sci. Technol. B 14, 294 (1996).
6. C. He, J. N. Basler, and C. H. Becker, Nature (London) 385, 797 (1997).
7. J. L. Hunter and S. F. Corcoran, J. Vac. Sci. Technol. A 8, 2323 (1990).
8. A. Schnieders, R. Möllers, M. Terhorst, H.-G. Cramer, E. Niehuis, and A. Benninghoven, J. Vac. Sci. Technol. B 14, 2712 (1996).
9. See, for example, P. K. Chu and S. L. Grube, Anal. Chem. 57, 1071 (1985).
10. T. Schenkel, M. A. Briere, H. Schmidt-Böcking, K. Bethge, and D. Schneider, Phys. Rev. Lett. 78, 2481 (1997); T. Schenkel, A. V. Barnes, M. A. Briere, A. Hamza, A. Schach von Wittenau, and D. H. Schneider, Nucl. Instrum. Methods Phys. Res. B 125, 153 (1997); T. Schenkel, M. A. Briere, A. Schach von Wittenau, and D. Schneider, Proceedings of the 43rd ASMS Conference, May 1995, Atlanta, p. 1336; T. Schenkel, M. A. Briere, H. Schmidt-Böcking, K. Bethge, and D. Schneider, Mater. Sci. Forum 248-249, 413 (1997).
11. T. Schenkel, M. A. Briere, H. Schmidt-Böcking, K. Bethge, and D. Schneider, Phys. Rev. Lett. 78, 2481 (1997); T. Schenkel, A. V. Barnes, M. A. Briere, A. Hamza, A. Schach von Wittenau, and D. H. Schneider, Nucl. Instrum. Methods Phys. Res. B 125, 153 (1997); T. Schenkel, M. A. Briere, A. Schach von Wittenau, and D. Schneider, Proceedings of the 43rd ASMS Conference, May 1995, Atlanta, p. 1336; T. Schenkel, M. A. Briere, H. Schmidt-Böcking, K. Bethge, and D. Schneider, Mater. Sci. Forum 248-249, 413 (1997).
12. T. Schenkel, M. A. Briere, H. Schmidt-Böcking, K. Bethge, and D. Schneider, Phys. Rev. Lett. 78, 2481 (1997); T. Schenkel, A. V. Barnes, M. A. Briere, A. Hamza, A. Schach von Wittenau, and D. H. Schneider, Nucl. Instrum. Methods Phys. Res. B 125, 153 (1997); T. Schenkel, M. A. Briere, A. Schach von Wittenau, and D. Schneider, Proceedings of the 43rd ASMS Conference, May 1995, Atlanta, p. 1336; T. Schenkel, M. A. Briere, H. Schmidt-Böcking, K. Bethge, and D. Schneider, Mater. Sci. Forum 248-249, 413 (1997).
13. T. Schenkel, M. A. Briere, H. Schmidt-Böcking, K. Bethge, and D. Schneider, Phys. Rev. Lett. 78, 2481 (1997); T. Schenkel, A. V. Barnes, M. A. Briere, A. Hamza, A. Schach von Wittenau, and D. H. Schneider, Nucl. Instrum. Methods Phys. Res. B 125, 153 (1997); T. Schenkel, M. A. Briere, A. Schach von Wittenau, and D. Schneider, Proceedings of the 43rd ASMS Conference, May 1995, Atlanta, p. 1336; T. Schenkel, M. A. Briere, H. Schmidt-Böcking, K. Bethge, and D. Schneider, Mater. Sci. Forum 248-249, 413 (1997).
14. D. H. Schneider and M. A. Briere, Phys. Scr. 53, 228 (1996); G. Schiwietz, M. Briere, D. Schneider, J. McDonald, and C. Cunningham, Nucl. Instrum. Methods Phys. Res. B 100, 47 (1995).
15. D. H. Schneider and M. A. Briere, Phys. Scr. 53, 228 (1996); G. Schiwietz, M. Briere, D. Schneider, J. McDonald, and C. Cunningham, Nucl. Instrum. Methods Phys. Res. B 100, 47 (1995).
16. D. Schneider et al., Phys. Rev. A 42, 3889 (1990).
17. Y. Yamamura and H. Tawara, At. Data Nucl. Data Tables 62, 149 (1996); G. Betz and G. K. Wehner, in Sputtering by Particle Bombardment II, edited by R. Behrisch (Springer, Berlin, 1983), p. 11.
18. Y. Yamamura and H. Tawara, At. Data Nucl. Data Tables 62, 149 (1996); G. Betz and G. K. Wehner, in Sputtering by Particle Bombardment II, edited by R. Behrisch (Springer, Berlin, 1983), p. 11.
19. J. A. Knapp, J. C. Barbour, and B. L. Doyle, J. Vac. Sci. Technol. A 10, 2685 (1992).
20. K. Iltgen, C. Bendel, A. Benninghoven, and E. Niehuis, J. Vac. Sci. Technol. A 15, 460 (1997).
21. M. Sporn, G. Libiseller, T. Neidhart, M. Schmid, F. Aumayr, H. P. Winter, P. Varga, M. Grether, D. Niemann, and N. Stolterfoht, Phys. Rev. Lett. 79, 945 (1997); T. Schenkel et al. (to be published).
22. M. Sporn, G. Libiseller, T. Neidhart, M. Schmid, F. Aumayr, H. P. Winter, P. Varga, M. Grether, D. Niemann, and N. Stolterfoht, Phys. Rev. Lett. 79, 945 (1997); T. Schenkel et al. (to be published).
23. T. Schenkel, Ph.D. thesis, J. W. Goethe Universität, Frankfurt, Germany, 1997.
24. S. W. Novak and R. G. Wilson, J. Appl. Phys. 69, 463 (1991); ibid. 69, 466 (1991).
25. S. W. Novak and R. G. Wilson, J. Appl. Phys. 69, 463 (1991); ibid. 69, 466 (1991).
26. J. A. Knapp, J. C. Banks, and B. L. Doyle, Nucl. Instrum. Methods Phys. Res. B 85, 20 (1994).
27. I. S. Bitensky and E. S. Parilis, Nucl. Instrum. Methods Phys Res B 21, 26 (1987); R. E. Johnson, B. U. R. Sundqvist, A. Hedin, and D. Fenyö, Phys. Rev. B 40, 49 (1989).
28. I. S. Bitensky and E. S. Parilis, Nucl. Instrum. Methods Phys Res B 21, 26 (1987); R. E. Johnson, B. U. R. Sundqvist, A. Hedin, and D. Fenyö, Phys. Rev. B 40, 49 (1989).
29. M. A. Briere, T. Schenkel, and D. H. Schneider, EBIT Annual Report 1994, LLNL, UCRL-ID-121572, p. 38 (unpublished).