Practical perspective of shallow junction analysis

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 1, 1996, Pages 202-212

  Heimbrook, L A ^a   Baiocchi, F A ^a   Bittner, T C ^a   Geva, M ^a   Luftman, H S ^a   Nakahara, S ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0003729433     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589030     Document Type: Review

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