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Volumn 78, Issue 12, 1997, Pages 2481-2484

Electronic sputtering of thin conductors by neutralization of slow highly charged ions

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EID: 4243350950     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.78.2481     Document Type: Article
Times cited : (60)

References (27)
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  • 26


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