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Volumn 2, Issue , 2001, Pages 2795-2801

Operating frequency of thin film NiTi in fluid media

Author keywords

Duty cycle; Nickel titanium; Shape memory alloy; Thin film

Indexed keywords

ACTUATORS; BANDWIDTH; FREQUENCIES; HEAT LOSSES; HEAT TRANSFER; HYSTERESIS; MINERAL OILS; NICKEL COMPOUNDS; PHASE TRANSITIONS; POLYIMIDES; REACTIVE ION ETCHING; SHAPE MEMORY EFFECT; SILICON WAFERS;

EID: 0005072612     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (4)

References (14)
  • 8
    • 0000893478 scopus 로고    scopus 로고
    • Relaxation and recovery of extrinsic stress in sputtered titanium-nickel thin films on (100)-Si
    • Grummon, D.S., Zhang, J., and Pence, T.J., "Relaxation and recovery of extrinsic stress in sputtered titanium-nickel thin films on (100)-Si," Materials Science and Engineering A, 1999, pp. 722-726.
    • (1999) Materials Science and Engineering A , pp. 722-726
    • Grummon, D.S.1    Zhang, J.2    Pence, T.J.3
  • 9
    • 0033906310 scopus 로고    scopus 로고
    • Dynamic actuation properties of TiNi shape memory diaphragm
    • Makino, E., Mitsuya, T., and Shibata, T., "Dynamic actuation properties of TiNi shape memory diaphragm," Sensors and Actuators, vol. 79, 2000, pp. 128-135.
    • (2000) Sensors and Actuators , vol.79 , pp. 128-135
    • Makino, E.1    Mitsuya, T.2    Shibata, T.3
  • 10
    • 0033906772 scopus 로고    scopus 로고
    • Micromachining of TiNi shape memory thin film for fabrication of micropump
    • Makino, E., Mitsuya, T., and Shibata, T., "Micromachining of TiNi shape memory thin film for fabrication of micropump," Sensors and Actuators, vol. 79, 2000, pp. 251-259.
    • (2000) Sensors and Actuators , vol.79 , pp. 251-259
    • Makino, E.1    Mitsuya, T.2    Shibata, T.3
  • 11
    • 0034833238 scopus 로고    scopus 로고
    • Fabrication of TiNi shape memory micropump
    • Makino, E., Mitsuya, T., and Shibata, T., "Fabrication of TiNi shape memory micropump," Sensors and Actuators, vol. 88, 2001, pp. 256-262.
    • (2001) Sensors and Actuators , vol.88 , pp. 256-262
    • Makino, E.1    Mitsuya, T.2    Shibata, T.3
  • 12
    • 0032647360 scopus 로고    scopus 로고
    • Thenno-mechanical properties of TiNi shape memory thin film formed by flash evaporation
    • Makino, E., Kato, K., and Shibata, T., "Thenno-mechanical properties of TiNi shape memory thin film formed by flash evaporation," Sensors and Actuators, A Physical, vol. 75, 1999, pp. 156-161.
    • (1999) Sensors and Actuators, A Physical , vol.75 , pp. 156-161
    • Makino, E.1    Kato, K.2    Shibata, T.3
  • 13
    • 0032673326 scopus 로고    scopus 로고
    • Sputter Deposition of NiTi Thin Film Exhibiting the SME at Room Temperature
    • submitted for publication, CA. March
    • Ho. K., Jardine, A., and Carman, G., "Sputter Deposition of NiTi Thin Film Exhibiting the SME at Room Temperature", submitted to SPIE for publication, CA. March 1999.
    • (1999) SPIE
    • Ho, K.1    Jardine, A.2    Carman, G.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.