Improvement of SiGe oxide grown by electron cyclotron resonance using H2O vapor annealing

Applied Physics Letters

Volumn 69, Issue 17, 1996, Pages 2578-2580

  Tchikatilov, D ^a   Yang, Y F ^a   Yang, E S ^a  

^a Columbia University ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001451684     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.117705     Document Type: Article

References (14)

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