Metal-insulator-semiconductor tunneling microscope: Two-dimensional dopant profiling of semiconductors with conducting atomic-force microscopy

Applied Physics Letters

Volumn 77, Issue 3, 2000, Pages 456-458

  Richter, S ^a,b   Geva, M ^b   Garno, J P ^a   Kleiman, R N ^a  

^a LUCENT TECHNOLOGIES   (United States)

^b NOKIA RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001053243     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.127008     Document Type: Article

References (20)

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