Scanning Capacitance Microscopy of Dopants in III-V Semiconductors

Microscopy and Microanalysis

Volumn 4, Issue , 1998, Pages 640-641

  Lang, David V ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 22444455332     PISSN: 14319276     EISSN: 14358115     Source Type: Journal    
DOI: 10.1017/S1431927600023321     Document Type: Article

References (4)

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3. Y. Huang and C. C. Williams, J. Vac. Sci. Technol. B 12(1994)369.
4. Dimension 3000 System, Digital Instruments, Inc., Santa Barbara, CA.