Polysilicon micromachining 3D mirror integrated frequency tuner for WDM applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4178, Issue , 2000, Pages 278-287

  Zhang, Xuming ^a   Chollet, F ^a   Chau, Fook S ^a   Quan, Chenggen ^a   Liu, Ai Q ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

And moems; Fiber optic communication; Frequency tuner; Optical mems; WDM

Indexed keywords

ACTUATORS; FABRY-PEROT INTERFEROMETERS; NUCLEAR INSTRUMENTATION; OPTICAL FIBER FABRICATION; OPTICAL FIBERS;

COATED OPTICAL FIBERS; DRIVING VOLTAGES; EXTERNAL CAVITY LENGTH; FEEDBACK STRENGTH; MONOLITHICALLY INTEGRATED; SINGLE MODE FABRY-PEROT LASER DIODES; THERMAL ACTUATOR; WAVELENGTH TUNABILITY;

TUNERS;

EID: 0000635877     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.396499     Document Type: Conference Paper

References (31)

1. B. Mukherjee, Optical Communication Networks, McGraw-Hill, New York, 1997.
2. H. Zang, J. P. Jue, and B. Mukherjee, "A review of routing and wavelength assignment approaches for wavelength-routed optical WDM networks, " Optical Networks 1 (1), pp. 47-60, 1997.
3. M.C. Wu, "Micromachinmg for optical and optoelectronic systems, " Proceedings of the WEE 85 (11), pp. 1833-1856, 1997.
4. P.F. Van Kessel, L.J. Hornbeck, R.E. Meier, and M.R. Douglass, "A MEMS-based projection display, Proceedings of the IEEE, " 86 (8)pp. 1687-1704, 1998.
5. R.S. Muller, and KY. Lau, "Surface-micromachined microoptical elements and systems, " Proceedings of the IEEE 86 (8), pp. 1705-1720, 1998.
6. H. Toshiyohsi, and H. Fujita, "Electrostatic micro torsion mirrors for an optical switch matrix, " Journal of Microelectromechanical Systems 5 (4), pp. 231-237, 1996.
7. S.S. Lee, L.Y. Lin, K.S.J. Pister, et al., "Passively aligned hybrid integration of 8x1 micromachined Micro-Fresnel lens arrays and 8x1 vertical-cavity surface-emitting laser arrays for free-space optical interconnect, " IEEE Photonics Technology Letters 7 (9), pp. 031-033, 1995.
8. L.Y. Lin, EL. Goldstein, and R.W. Tkach, "Angular-precision enhancement in free-space micromachined optical switches, " IEEE Photonics Technology Letters 11 (10), pp. 1253-1255, 1999.
9. S.S Lee, L-S Huang, C-i Kim, and MC. Wu, "Free-space fiber-optical switches based on MEMS vertical torsion mirrors, " Joarnal ofLightwave Technology 17 (1), pp. 7-13, 1999.
10. R.T. Chen, H. Nguyen. and MC. Wu, "A low voltage micromachined optical switch by stress-induced bending, " IEEE international MEMS '99 Twelfth IEEE International Conference on Micro Electro Mechanical Systems, Florida USA, pp. 424-428, 1999.
11. CR. Giles, B. Barber, V. Aksyuk, et al., "Reconfigurable 16-channel WDM drop module usmg silicon MEMS optical switches, " IEEE Photonics Technology Letters 11 (1), pp. 63-65, 1999.
12. P. Mannion, "Thermal actuator ruggedizes fast optical MEMS router, " Electronic Design, pp. 31, Jan 10 2000.
13. L.Y. Lin, J.L. Shen, S.S. Lee, et al., "Tunable three-dimensional solid Fabry-Perot etalons fabricated by surfacemicromachining, " IEEE Photonics Technology Letters 8 (1), pp. 101-103, 1996.
14. K. Akimoto, Y. Uenishi, K. Honma, and S. Nagaoka, "Optical reflective filter with comb-drive Nickel micromirror for optical fiber communication, " 1997 Proceedings 47th Electronic Components and Technology Conference, San Jose USA, pp. 614-619, 1997.
15. A.T.T.D. Tran, Y.H. Lo, Z.H. Zhu, et al., "Surface Micromachined Fabry-Perot tunable filter, " IEEE Photonics Technology Letters 8 (3), pp. 393-395, 1996.
16. G.L. Christenson, A.T.T.D. Tran, Z.H. Zhu, et al., "Long-wavelength resonant vertical-cavity LED/Photodetector with a 75-nm tuning range, " IEEE Photonics Technology Letters 9 (6), pp. 725-727, 1997.
17. P. Tayebati, PD. Wang, D. Vakhshoori, and RN. Sacks, "Widely tunable Faby-Perot filter using Ga(Al)As-AIO, deformable mirrors, " IEEE Photonics Technology Letters 10 (3), pp. 394-396, 1998.
18. J. Daleiden, N. Chitica. M. Strassner, et al., "Tunable InP/Air gap Fabry Perot filter for Wavelength Division Multiplex fiber optical transmission, " The international Conference on Indium Phosphide and Related Materials, Davos Switzerland, pp. 285-287, 1999.
19. WM. Wang, K.T.V. Gratten, A.W. Palmer, and W.J.O. Boyle, "Self-mixing interference inside a single-mode diode laser for optical sensing application, " Journal ofUghtwave Technology 12 (9), pp. 1577-1587, 1994.
20. T. Bosch, N. Servagent, and M. Lescure, "A displacement sensor for spectrum analysis using the optical feedback in a single-mode laser diode, " IEEE instrumentation and Measurement Technology Conference, Ottawa Canada, pp. 870-873, 1997.
21. T. Shibata, S. Shinohara, H. Ikeda, et al., "Laser speckle velocimeter using self-mixing laser diode, " IEEE Transactions on Instrumentation and Measurement 45 (2), pp. 499-503, 1996.
22. F. Chollet, A.Q. Liu, L.D. Zheng, A. Asundi, and LW. Un, "Improved silicon micromachined 3-D mirror for acceleration sensing using an extra-short external cavity laser self-mixing interferometer, " Part of the SP1E Conference on Photonics Technology into the 2F1 Century: Semiconductors, Microstructures, and Nanostructures, SPIE 3899, Singapore, pp. 98-107, 1999.
23. Z.M. Chuang, D.A. Cohen, and L.A. Coldren, "Tuning characteristics of a tunable-single-frequency external-cavity laser, " IEEE Journal ofQuantum Electronics 26 (7), pp. 1200-1205, 1990.
24. Y. Uenishi, M. Tsugai, and M. Mehregany, "Hybrid-integrated laser-diode micro-external mirror fabricated by (110) silicon micromachining, " Electronics Letters 31 (12), pp. 965-966, 1995.
25. Y. Uenishi, K. Honma, and S. Nagaoka, "Tunable laser diode using a nickel micromachined external mirror, " Electronics Letters 32 (13), pp. 1207-1208, 1996.
26. Kiyoshi Nosu, Optical FDM network technologies, Artech House, Inc., Britain, 1997.
27. W.M. Wang, K.T.V. Grattan, A.W. Palmer, and W.J.O. Boyle, "Self-mixing interference inside a single-mode diode laser for optical sensing applications, " Journal of Hightwave Technology 12 (9), pp. 1577-1587, 1994.
28. Eytan Modiano, and Aradhana Narula-Tam, "Mechanisms for providing optical bass in WDM-based networks, " Optical Networks 1 (1), pp. 11-18, 2000.
29. A. Pattavina, M. Martirielli, G. Maier, and P. Bo, "Techniques and technologies towards all-optical switching, " Optical Networks 1 (2), pp. 75-92, 2000.
30. A. Friedberger, and R.S. Muller, "Improved surface-micromachined hinges for fold-out structures, " Journal of Microelectromechanical Systems 7 (3), pp.315-319, 1998.
31. K.S.J. Pister, M.W. Judy, S.R. Burgett, and R.S. Fearing, "Microfabricated hinges, " Sensors and Actuators A 33, pp. 249-256, 1992.