Optical reflective filter with comb-drive nickel micromirror for optical fiber communication

Proceedings - Electronic Components and Technology Conference

Volumn , Issue , 1997, Pages 614-619

  Akimoto, Koji ^a   Uenishi, Yuji ^a   Honma, Kazuharu ^a   Nagaoka, Shinji ^a  

^a NTT CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MIRRORS; OPTICAL COMMUNICATION; OPTICAL FIBERS; PHOTORESISTS; SEMICONDUCTOR DEVICE MANUFACTURE;

COMB DRIVE NICKEL MICROMIRROR; ELECTROSTATIC COMB DRIVE ACTUATOR; OPTICAL REFLECTIVE FILTER;

OPTICAL FILTERS;

EID: 0030673334     PISSN: 05695503     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)