Surface micromachined fabry-perot tunable filter

IEEE Photonics Technology Letters

Volumn 8, Issue 3, 1996, Pages 393-395

  Tran, A T T D ^b   Lo, Y H ^a,b   Zhu, Z H ^b,c   Haronian, D ^b   Mozdy, E ^b  

^a IEEE

^b Cornell University   (United States)

^c ZHEJIANG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; DETECTORS; FABRICATION; FREQUENCY DIVISION MULTIPLEXING; LIGHT MODULATORS; MICROMACHINING; OPTOELECTRONIC DEVICES;

FABRY-PEROT TUNABLE FILTERS; SURFACE EMITTING LASERS; SURFACE MICROMACHINING; WAVELENGTH TUNING;

OPTICAL FILTERS;

EID: 0030107351     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/68.481128     Document Type: Article

References (8)

1. S. S. Lee, L. Y. Lin, K. S. J. Pister, M. C. Wu, "Three-dimensional microgratings for free-space optical interconnects and clock-distribution systems," in Proc. Conf. Lasers Electro-Opt. (CLEO), vol. CFF7, 1995, p. 400.
2. O. Solgaard, M. Daneman, N. Tien, A. Friedberger, R. S. Muller, and K. Y. Lau, "Optoelectronic packaging using silicon surface-micromachined alignment mirrors," IEEE Photon. Technol. Lett., vol. 7, no. 1, pp. 41-43, 1995.
3. L. Y. Lin, S. S. Lee, K. S. J. Pister, and M. C. Wu, "Micro-machined three-dimensional micro-optics for free-space optical system," IEEE Photon. Technol. Lett., vol. 6, no. 12, pp. 1445-1447, 1994.
4. A. T. T. D. Tran, D. Haronian, N. MacDonald, and Y. H. Lo, "Electromechanically tunable micro Fabry-Perot filter array," in Tech. Dig., 53rd Device Res. Conf., Charlottesville, VA, 1995.
5. E. C. Vail, M. S. Wu, G. S. Li, L. E. Eng, and C. J. Chang-Hasnain, "Highly tunable (70 nm) optical filter using GaAs DBR movable cantilevers," Electron. Lett., vol. 31, pp. 228-229, 1995.
6. L. J. Hornbeck, "Deformable mirrors spatial light modulator," in SPIE Proc., Spatial Light Modulators and Applicat. III, vol. 1150, 1989, p. 86.
7. S. W. Smith, A. A. Yasseen, M. Mehregany, and F. L. Merat, "Micromotor grating optical switch," Opt. Lett., vol. 20, pp. 1734-1736, 1995.
8. A. T. Tran, D. Haronian, N. A. Switz, Y. H. Lo, and N. C. MacDonald, "Micromachined tunable micro interferometer for optical accelerometer," CLEO, 1995, postdeadline paper CPD18.