Characterization of organic low-dielectric-constant materials using optical spectroscopy

Optics Express

Volumn 9, Issue 3, 2001, Pages 141-151

  Postava, K ^a   Yamaguchi, T ^a   Nakano, T ^b  

^a SHIZUOKA UNIVERSITY   (Japan)

^b HONEYWELL   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRY; FOURIER TRANSFORMS; INFRARED RADIATION; OPTICAL PROPERTIES; PERMITTIVITY; POLARIMETERS; SEMICONDUCTOR DEVICE MANUFACTURE; SPECTROSCOPIC ANALYSIS; THIN FILMS;

OPTICAL FUNCTIONS; OPTICAL SPECTROSCOPY; SEMICONDUCTOR INDUSTRY; ULTRALARGE SCALE INTEGRATION (ULSI);

DIELECTRIC MATERIALS;

EID: 0000595947     PISSN: 10944087     EISSN: None     Source Type: Journal    
DOI: 10.1364/OE.9.000141     Document Type: Article

References (20)

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