-
5
-
-
21544480230
-
-
T. Itoh, S. Okuoka, M. Kubo, and S. Iwatsuki, J. Polym. Sci., Part A: Polym. Chem. 33, 239 (1995).
-
(1995)
J. Polym. Sci., Part A: Polym. Chem.
, vol.33
, pp. 239
-
-
Itoh, T.1
Okuoka, S.2
Kubo, M.3
Iwatsuki, S.4
-
7
-
-
0024177010
-
-
in Soc. for the Adv. of Mat. & Proc. Eng. Seattle, WA, June 14-16
-
W. F. Beach and T. M. Austin, in 2nd Int. SAMPE Elect. Conf. (Soc. for the Adv. of Mat. & Proc. Eng. Seattle, WA, June 14-16, 1988), pp. 25-35.
-
(1988)
2nd Int. SAMPE Elect. Conf.
, pp. 25-35
-
-
Beach, W.F.1
Austin, T.M.2
-
8
-
-
0023526727
-
-
in Soc. for the Adv. of Mat. & Proc. Eng., Santa Clara, CA, June 23-25
-
B. J. Bachman, in 1st Int. SAMPE Elect. Conf. (Soc. for the Adv. of Mat. & Proc. Eng., Santa Clara, CA, June 23-25, 1987), pp. 431-7.
-
(1987)
1st Int. SAMPE Elect. Conf.
, pp. 431-7
-
-
Bachman, B.J.1
-
9
-
-
0344468888
-
-
in ULSI Multlevel Interconnect Conf., Santa Clara, CA, February 20-21
-
J. Wary, R. A. Olson, and W. F. Beach, in DUMIC Conf. 1996 ISMIC (ULSI Multlevel Interconnect Conf., Santa Clara, CA, February 20-21, 1996), pp. 207-13.
-
(1996)
DUMIC Conf. 1996 ISMIC
, pp. 207-13
-
-
Wary, J.1
Olson, R.A.2
Beach, W.F.3
-
10
-
-
0005346840
-
-
S. Dabral, X. Zhang, X. M. Wu, G.-R. Yang, L. You, C. I. Lang, K. Hwang, G. Cuan, C. Chiang, H. Bakhru, R. Olson, J. A. Moore, T.-M. Lu, and J. F. McDonald, J. Vac. Sci. Technol. B 11, 1825 (1993).
-
(1993)
J. Vac. Sci. Technol. B
, vol.11
, pp. 1825
-
-
Dabral, S.1
Zhang, X.2
Wu, X.M.3
Yang, G.-R.4
You, L.5
Lang, C.I.6
Hwang, K.7
Cuan, G.8
Chiang, C.9
Bakhru, H.10
Olson, R.11
Moore, J.A.12
Lu, T.-M.13
McDonald, J.F.14
-
11
-
-
0027290097
-
-
L. You, G.-R. Yang, C.-I. Lang, P. Wu, J. A. Moore, J. F. McDonald, and T.-M. Lu, Mater. Res. Soc. Symp. Proc. 282, 593 (1993).
-
(1993)
Mater. Res. Soc. Symp. Proc.
, vol.282
, pp. 593
-
-
You, L.1
Yang, G.-R.2
Lang, C.-I.3
Wu, P.4
Moore, J.A.5
McDonald, J.F.6
Lu, T.-M.7
-
12
-
-
21344481788
-
-
L. You, G.-R. Yang, C.-I. Lang, J. A. Moore, P. Wu, J. F. McDonald, and T.-M. Lu, J. Vac. Sci. Technol. A 11, 3047 (1993).
-
(1993)
J. Vac. Sci. Technol. A
, vol.11
, pp. 3047
-
-
You, L.1
Yang, G.-R.2
Lang, C.-I.3
Moore, J.A.4
Wu, P.5
McDonald, J.F.6
Lu, T.-M.7
-
13
-
-
0242657039
-
-
A. V. Pebalk, I. E. Kardash, N. V. Kozlova, E. L. Zaitseva, Y. A. Kozlov, and A. N. Pravednikov, Vysokomolekuliarnye Soedineniia Seriia A 22, 972 (1980).
-
(1980)
Vysokomolekuliarnye Soedineniia Seriia a
, vol.22
, pp. 972
-
-
Pebalk, A.V.1
Kardash, I.E.2
Kozlova, N.V.3
Zaitseva, E.L.4
Kozlov, Y.A.5
Pravednikov, A.N.6
-
14
-
-
0001501441
-
-
in Wiley, New York
-
W. F. Beach, C. Lee, D. R. Basset, T. M. Austin, and R. A. Olson in Encycl. Polym. Sci. & Tech. (Wiley, New York, 1989), Vol. 17, pp. 990-1025.
-
(1989)
Encycl. Polym. Sci. & Tech.
, vol.17
, pp. 990-1025
-
-
Beach, W.F.1
Lee, C.2
Basset, D.R.3
Austin, T.M.4
Olson, R.A.5
-
18
-
-
0342849218
-
-
S. Dabral, J. Van Etten, C. Apblett, G. R. Yang, P. Ficalora, and J. F. McDonald, Mater. Res. Soc. Symp. Proc. 239, 113 (1992).
-
(1992)
Mater. Res. Soc. Symp. Proc.
, vol.239
, pp. 113
-
-
Dabral, S.1
Van Etten, J.2
Apblett, C.3
Yang, G.R.4
Ficalora, P.5
McDonald, J.F.6
|