Poly(tetraflouro-p-xylylene), a low dielectric constant chemical vapor polymerized polymer

Applied Physics Letters

Volumn 72, Issue 2, 1998, Pages 258-260

  Senkevich, Jay J ^a   Desu, Seshu B ^a  

^a State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001350099     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120703     Document Type: Article

References (18)

1. P. Singer, Semicond. Int. May, 88 (1996).
2. J. F. Gaynor, J. J. Senkevich, and S. B. Desu, J. Mater. Res. 11, 1842 (1996).
3. J. F. Gaynor and S. B. Desu, J. Mater. Res. 11, 236 (1996).
4. J. F. Gaynor and S. B. Desu, J. Mater. Res. 9, 3125 (1994).
5. T. Itoh, S. Okuoka, M. Kubo, and S. Iwatsuki, J. Polym. Sci., Part A: Polym. Chem. 33, 239 (1995).
6. W. F. Beach and T. M. Austin, SAMPE J. 24, 9 (1988).
7. W. F. Beach and T. M. Austin, in 2nd Int. SAMPE Elect. Conf. (Soc. for the Adv. of Mat. & Proc. Eng. Seattle, WA, June 14-16, 1988), pp. 25-35.
8. B. J. Bachman, in 1st Int. SAMPE Elect. Conf. (Soc. for the Adv. of Mat. & Proc. Eng., Santa Clara, CA, June 23-25, 1987), pp. 431-7.
9. J. Wary, R. A. Olson, and W. F. Beach, in DUMIC Conf. 1996 ISMIC (ULSI Multlevel Interconnect Conf., Santa Clara, CA, February 20-21, 1996), pp. 207-13.
10. S. Dabral, X. Zhang, X. M. Wu, G.-R. Yang, L. You, C. I. Lang, K. Hwang, G. Cuan, C. Chiang, H. Bakhru, R. Olson, J. A. Moore, T.-M. Lu, and J. F. McDonald, J. Vac. Sci. Technol. B 11, 1825 (1993).
11. L. You, G.-R. Yang, C.-I. Lang, P. Wu, J. A. Moore, J. F. McDonald, and T.-M. Lu, Mater. Res. Soc. Symp. Proc. 282, 593 (1993).
12. L. You, G.-R. Yang, C.-I. Lang, J. A. Moore, P. Wu, J. F. McDonald, and T.-M. Lu, J. Vac. Sci. Technol. A 11, 3047 (1993).
13. A. V. Pebalk, I. E. Kardash, N. V. Kozlova, E. L. Zaitseva, Y. A. Kozlov, and A. N. Pravednikov, Vysokomolekuliarnye Soedineniia Seriia A 22, 972 (1980).
14. W. F. Beach, C. Lee, D. R. Basset, T. M. Austin, and R. A. Olson in Encycl. Polym. Sci. & Tech. (Wiley, New York, 1989), Vol. 17, pp. 990-1025.
15. D. E. Kirkpartrick and B. Wuderlich, Makromol. Chem. 186, 2595 (1985).
16. N. S. Murthy and H. Kim, Polymer 25, 1093 (1984).
17. B. D. Cullity, Elements of X-Ray Diffraction (Addison-Wesley, Reading, MA, 1978), p. 284.
18. S. Dabral, J. Van Etten, C. Apblett, G. R. Yang, P. Ficalora, and J. F. McDonald, Mater. Res. Soc. Symp. Proc. 239, 113 (1992).