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Volumn 72, Issue 2, 1998, Pages 258-260

Poly(tetraflouro-p-xylylene), a low dielectric constant chemical vapor polymerized polymer

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EID: 0001350099     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120703     Document Type: Article
Times cited : (44)

References (18)
  • 7
    • 0024177010 scopus 로고
    • in Soc. for the Adv. of Mat. & Proc. Eng. Seattle, WA, June 14-16
    • W. F. Beach and T. M. Austin, in 2nd Int. SAMPE Elect. Conf. (Soc. for the Adv. of Mat. & Proc. Eng. Seattle, WA, June 14-16, 1988), pp. 25-35.
    • (1988) 2nd Int. SAMPE Elect. Conf. , pp. 25-35
    • Beach, W.F.1    Austin, T.M.2
  • 8
    • 0023526727 scopus 로고
    • in Soc. for the Adv. of Mat. & Proc. Eng., Santa Clara, CA, June 23-25
    • B. J. Bachman, in 1st Int. SAMPE Elect. Conf. (Soc. for the Adv. of Mat. & Proc. Eng., Santa Clara, CA, June 23-25, 1987), pp. 431-7.
    • (1987) 1st Int. SAMPE Elect. Conf. , pp. 431-7
    • Bachman, B.J.1
  • 9
    • 0344468888 scopus 로고    scopus 로고
    • in ULSI Multlevel Interconnect Conf., Santa Clara, CA, February 20-21
    • J. Wary, R. A. Olson, and W. F. Beach, in DUMIC Conf. 1996 ISMIC (ULSI Multlevel Interconnect Conf., Santa Clara, CA, February 20-21, 1996), pp. 207-13.
    • (1996) DUMIC Conf. 1996 ISMIC , pp. 207-13
    • Wary, J.1    Olson, R.A.2    Beach, W.F.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.