Estimation of the dielectric properties of low-k materials using optical spectroscopy

Applied Physics Letters

Volumn 79, Issue 14, 2001, Pages 2231-2233

  Postava, K ^a   Yamaguchi, T ^a   Horie, M ^b  

^a SHIZUOKA UNIVERSITY   (Japan)

^b DAINIPPON SCREEN MFG CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035473548     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1408607     Document Type: Article

References (16)

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