New development strategies for high aspect ratio microstructures

Microsystem Technologies

Volumn 4, Issue 2, 1998, Pages 94-97

  Zanghellini, J ^a   Achenbach, S ^a   El Kholi, A ^a   Mohr, J ^a   Pantenburg, F J ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002999277     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420050104     Document Type: Article

References (3)

1. Bacher W; Menz W; Mohr J: (1995) The LIGA Technique and its potential for microsystems - A survey. IEEE transactions on industrial electronics, Vol. 42 No. 5
2. El-Kholi A; Mohr J; Stransky S: (1994) Ultrasonic supported development of irradiated micro-structures. Microelectronic Engineering 23, 219-222
3. Zanghellini J; El-Kholi A; Mohr J: (1997) Development behaviour of irradiated microstructures. Microelectronic Engineering 35, 409-412