Metal-organic CVD of tantalum oxide from tert-butylimidotris(diethylamido)tantalum and oxygen

Chemical Vapor Deposition

Volumn 6, Issue 5, 2000, Pages 223-225

  Chiu, Hsin Tien ^a   Wang, Chun Nan ^a   Chuang, Shiow Huey ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000375075     PISSN: 09481907     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-3862(200010)6:5<223::aid-cvde223>3.3.co;2-8     Document Type: Article

References (19)

1. H. Treichel, A. Mitwalsky, G. Tempel, G. Zorn, D. A. Bohling, K. R. Coyle, B. S. Felker, M. George, W. Kern, A. P. Lane, N. P. Sandler, Adv. Mater. Opt. Electron. 1995, 5, 163.
2. F.-C. Chiu, J.-J. Wang, J.-Y. Lee, S.-C. Wu, J. Appl. Phys. 1997, 81, 6911.
3. K. A. McKinley, N. P. Sandler, Thin Solid Films 1996, 291, 440.
4. E. P. Burte, N. Rausch, J. Non-Cryst. Solids 1995, 187, 425.
5. H. Shinriki, M. Nakata, IEEE Trans. Electron Devices 1991, 38, 455.
6. M. H. Chisholm, I. P. Rothwell, in Comprehensive Coordination Chemistry, Vol. 2 (Ed: G. Wilkinson), Pergamon, Oxford 1987, p. 347.
7. H.-T. Chiu, S.-H. Chuang, C.-E. Tsai, G.-H. Lee, S.-M. Peng, Polyhedron 1998, 17, 2187.
8. M.-H. Tsai, S.-C. Sun, H.-T. Chiu, C.-E. Tsai, S.-H. Chuang, Appl. Phys. Lett. 1995, 67, 1128.
9. K. A. Son, A. Y. Mao, Y. M. Sun, B. Y. Kim, F. Liu, A. Kamath, J.-M. White, D. L. Kwong, D. A. Roberts, R. N. Vrtis, Appl. Phys. Lett. 1998, 72, 1187.
10. I. Kim, S.-D. Ahn, B.-W. Cho, S.-T. Ahn, J.-Y. Lee, J. S. Chun, W.-J. Lee, Jpn. J. Appl. Phys. 1994, 34, 6691.
11. Handbook of X-ray Photoelectron Spectroscopy (Eds: J. F. Moulder, W. F. Stickle, P. E. Sobol, K. D. Bomben), Perkin-Elmer, Eden Prairie, MN 1992.
12. S. Hofmann, in Practical Surface Analysis, Vol. 1: Auger and X-ray Photoelectron Spectroscopy (Eds: D. Briggs, M. P. Seah), Wiley, Chichester 1990, p. 169.
13. J. Hunder, P.-E. Hellberg, D. Kusche, H. Ohlsén, Thin Solid Films 1996, 281-282, 415.
14. A. Nagahori, R. Raj, J. Am. Ceram. Soc. 1995, 78, 1585.
15. J. L. Autran, P. Paillet, J. L. Leray, R. A. B. Devine, Sens. Actuators A 1995, 51, 5.
16. J. Y. Zhang, L. J. Bie, I. W. Boyd, Jpn. J. Appl. Phys. 1998, 37, L27.
17. P. G. Clem, N. L. Jeon, R. G. Nuzzo, D. A. Payne, J. Am. Ceram. Soc. 1997, 80, 2821.
18. Y. Chen, R. Singh, J. Narayan, J. Electron. Mater. 1997, 26, 350.
19. M. F. Zhou, Z. W. Fu, H. J. Yang, Z. J. Zhang, Q. Z. Qin, Appl. Surf. Sci. 1997, 108, 399.