Effects of precursors and substrate materials on microstructure, dielectric properties, and step coverage of (Ba, Sr)TiO3 films grown by metalorganic chemical vapor deposition

Journal of Applied Physics

Volumn 87, Issue 1, 2000, Pages 124-132

  Gao, Y ^a   He, S ^a   Alluri, P ^b   Engelhard, M ^a   Lea, A S ^a   Finder, J ^c   Melnick, B ^b   Hance, R L ^b  

^a PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

^b MOTOROLA INC   (United States)

^c MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000362565     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.371833     Document Type: Article

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