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Volumn 15, Issue 1, 1997, Pages 38-39
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Growth of silicon nitride by scanned probe lithography
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Author keywords
[No Author keywords available]
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Indexed keywords
AIR;
AMMONIA;
ATOMIC FORCE MICROSCOPY;
LITHOGRAPHY;
NANOSTRUCTURED MATERIALS;
NITROGEN;
SEMICONDUCTOR GROWTH;
SILICON WAFERS;
VACUUM;
ANHYDROUS AMMONIA;
SCANNING PROBE LITHOGRAPHY;
SILICON NITRIDES;
NITRIDES;
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EID: 3943059598
PISSN: 10711023
EISSN: None
Source Type: Journal
DOI: 10.1116/1.589251 Document Type: Article |
Times cited : (10)
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References (14)
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