SCOPUS 정보 검색 플랫폼

Volumn 15, Issue 1, 1997, Pages 38-39

Growth of silicon nitride by scanned probe lithography

Author keywords

[No Author keywords available]

Indexed keywords

AIR; AMMONIA; ATOMIC FORCE MICROSCOPY; LITHOGRAPHY; NANOSTRUCTURED MATERIALS; NITROGEN; SEMICONDUCTOR GROWTH; SILICON WAFERS; VACUUM;

ANHYDROUS AMMONIA; SCANNING PROBE LITHOGRAPHY; SILICON NITRIDES;

NITRIDES;

EID: 3943059598 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.589251 Document Type: Article

Times cited : (10)

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