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Volumn 15, Issue 1, 1997, Pages 38-39

Growth of silicon nitride by scanned probe lithography

Author keywords

[No Author keywords available]

Indexed keywords

AIR; AMMONIA; ATOMIC FORCE MICROSCOPY; LITHOGRAPHY; NANOSTRUCTURED MATERIALS; NITROGEN; SEMICONDUCTOR GROWTH; SILICON WAFERS; VACUUM;

EID: 3943059598     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589251     Document Type: Article
Times cited : (10)

References (14)
  • 13
    • 3943086640 scopus 로고    scopus 로고
    • Digital Instruments, Inc., 520 E. Montecito St., Santa Barbara, CA 93103
    • Digital Instruments, Inc., 520 E. Montecito St., Santa Barbara, CA 93103.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.