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Thin Solid Films

Volumn 337, Issue 1-2, 1999, Pages 240-247

Low temperature silicon deposition for large area sensors and solar cells

(1) Schubert, M B a

a UNIVERSITY OF STUTTGART (Germany)

Author keywords

Amorphous silicon; Hot wire deposition; Thin film sensors

Indexed keywords

EID: 0000123515 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(98)01435-7 Document Type: Article

Times cited : (26)

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