Observation of improved structural ordering in low H content, hot wire deposited a-Si:H

Materials Research Society Symposium - Proceedings

Volumn 467, Issue , 1997, Pages 657-662

  Mahan, A H ^a   Williamson, D L ^a   Furtak, T E ^a  

^a NATIONAL RENEWABLE ENERGY LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; ANNEALING; CHEMICAL VAPOR DEPOSITION; CRYSTAL STRUCTURE; ELECTRONIC PROPERTIES; HYDROGEN; RAMAN SPECTROSCOPY; SUBSTRATES; X RAY DIFFRACTION;

HOT WIRE DEPOSITION; HYDROGENATED AMORPHOUS SILICON; STAEBLER-WRONSKI EFFECT;

AMORPHOUS FILMS;

EID: 0031334094     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-467-657     Document Type: Conference Paper

References (20)