High silicon etch rates by hot filament generated atomic hydrogen

Journal of Physics D: Applied Physics

Volumn 30, Issue 8, 1997, Pages

  Wanka, H N ^a   Schubert, M B ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CHEMICAL BONDS; COALESCENCE; COMPOSITION EFFECTS; ETCHING; HYDROGEN; HYDROGENATION; INTERFACES (MATERIALS); MOLECULAR STRUCTURE; POLYCRYSTALLINE MATERIALS; SEMICONDUCTOR DOPING; SUBSTRATES;

HOT TUNGSTEN FILAMENTS; MICROCRYSTALLINE SILICON;

SEMICONDUCTING SILICON;

EID: 0031123701     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/30/8/002     Document Type: Article

References (19)

1. Haller I, Lee Y H, Nocera J J Jr and Jaso M A 1988 J. Electrochem. Soc.: Solid-State Sci. Technol. 135 2042-5
2. Desmond C A, Hunt C E and Farrens SN 1994 J. Electrochem. Soc. 141 178-84
3. Vepřek S and Sarott F-A 1982 Plasma Chem. Plasma Processing 2 233-46
4. Otobe M, Kimura M and Oda S 1994 Japan. J. Appl. Phys. 33 4442-5
5. Qin S, Bernstein J D and Chan C 1996 J. Electron. Mater. 25 507-11
6. Lee Y H and Chen M-M 1985 J. Vac. Sci. Technol. B 4 468-75
7. Baldi L and Beardo D 1985 J. Appl. Phys. 57 2221-5
8. Westlake W and Heintze M 1995 J. Appl. Phys. 77 879-84
9. Mahan A H, Carapella J, Nelson B P, Crandall R S and Balberg I 1991 J. Appl. Phys. 69 6728-30
10. See for example, Middya A R, Lloret A, Perrin J, Hue J, Moncel J L, Parey J Y and Rose G 1995 Mater. Res. Soc. Symp. Proc. (Pittsburgh, PA 1995) vol 377, pp 119-24
11. Smith S N Jr and File W L 1962 J. Chem. Phys. 37 898-904
12. An I, Li Y M, Wronski C R and Collins R W 1993 Phys. Rev. B 48 4464-72
13. Nguyen H V, An I, Collins R W, Lu Y, Wakagi M and Wronski CR 1994 Appl. Phys. Lett. 65 3335-7
14. Boland J J and Parsons G N 1992 Science 256 1304-6
15. Heintze M, Zedlitz R, Wanka H N and Schubert M B 1996 J. Appl. Phys. 79 2699-706
16. Wanka H N, Zedlitz R, Heintze M and Schubert MB 1995 Conf. Proc. 13th EC PVSEC (Brussels, 1995) pp 1753-6
17. Abrefah J and Olander D R 1989 Surf. Sci. 209 291-313
18. Wanka H N, Hierzenberger A and Schubert MB 1995 Mater. Res. Soc. Symp. Proc. (Pittsburgh, PA, 1995) vol 377, pp 263-8
19. Perrin J, Takeda Y, Hirano N, Takeuchi Y and Matsuda A 1989 Surf. Sci. 210 114-28