InN growth and annealing investigations using in-situ spectroscopic ellipsometry

Journal of Crystal Growth

Volumn 272, Issue 1-4 SPEC. ISS., 2004, Pages 87-93

  Drago, M ^a   Schmidtling, T ^a   Werner, C ^a   Pristovsek, M ^a   Pohl, U W ^a   Richter, W ^a  

^a TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

Author keywords

A1. Annealing; A1. In situ spectroscopic ellipsometry; A3. Metalorganic vapor phase epitaxy; B1. Indium nitride; B1. Nitrides; B2. Semiconducting III V materials

Indexed keywords

AMMONIA; ANNEALING; ELLIPSOMETRY; ETCHING; HYDROGEN; METALLORGANIC VAPOR PHASE EPITAXY; NITRIDES; SPECTROSCOPIC ANALYSIS; THERMODYNAMIC STABILITY;

INDIUM NITRIDE; PRECURSOR; SPECTROSCOPIC ELLIPSOMETRY; STRUCTURAL QUALITY;

INDIUM COMPOUNDS;

EID: 9944221407     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2004.08.040     Document Type: Conference Paper

References (15)

1. W.-K. Chen, Y.C. Pan, H.C. Lin, J. Ou, W.H. Chen, M.C. Lee, Jpn. J. Appl. Phys. 36 (1997) L1625.
2. E. Lax, C. Synowietz (Eds.), D'Ans Lax Taschenbuch für Chemiker und Physiker, Band I, Springer, Berlin, 1967.
3. T. Schmidtling, M. Drago, U.W. Pohl, W. Richter, J. Crystal Growth 248 (2003) 523.
4. M. Drago, T. Schmidtling, U.W. Pohl, S. Peters, W. Richter, Phys. Stat. Sol. (c) 0 (2003) 2842.
5. S. Peters, T. Schmidtling, T. Trepk, U.W. Pohl, J.-T. Zettler, W. Richter, J. Appl. Phys. 88 (2000) 4085.
6. F. Bechstedt, J. Furthmüller, M. Ferhat, L.K. Teles, L.M.R. Scolfaro, J.R. Leite, V.Yu. Davidov, O. Ambacher, R. Goldhahn, Phys. Stat. Sol. (a) 195 (2003) 628.
7. V. Yu. Davidov, A.A. Klochkin, R.P. Seisyan, V.V. Emtsev, S.V. Ivanov, F. Bechstedt, J. Furthmüller, H. Harima, A.V. Mudryi, J. Aderhold, O. Semchinova, J. Graul, Phys. Stat. Sol. (b) 229 (3) (2002) R1; T. Matsuoka, H. Okamoto, M. Nakao, H. Harima, E. Kurimoto, J. Appl. Phys. 81 (2002) 1246.
8. V. Yu. Davidov, A.A. Klochkin, R.P. Seisyan, V.V. Emtsev, S.V. Ivanov, F. Bechstedt, J. Furthmüller, H. Harima, A.V. Mudryi, J. Aderhold, O. Semchinova, J. Graul, Phys. Stat. Sol. (b) 229 (3) (2002) R1; T. Matsuoka, H. Okamoto, M. Nakao, H. Harima, E. Kurimoto, J. Appl. Phys. 81 (2002) 1246.
9. R.M.A. Azzam, N.M. Bashara, Ellipsometry and Polarized Light, North-Holland, Amsterdam, 1977.
10. E. Kurimoto, M. Hangyo, H. Harima, M. Yoshimoto, T. Yamaguchi, T. Araki, Y. Nanishi, K. Kisoda, Appl. Phys. Lett. 84 (2004) 212.
11. R. Goldhahn, S. Shokovets, V. Cimalla, L. Spiess, G. Ecke, O. Ambacher, J. Furthmüller, F. Bechstedt, H. Lu, V.J. Schaff, Mater. Res. Soc. Symp. Proc. 743 (2003) L5.9.1.
12. A.C. Bhuyian, A. Hashimoto, A. Yamamoto, J. Appl. Phys. 94 (2003) 2779.
13. A. Koukitu, T. Taki, N. Takahashi, H. Seki, J. Crystal. Growth 197 (1999) 99.
14. S. Yamaguchi, M. Kariya, S. Nitta, T. Takeuchi, C. Wetzel, H. Amano, I. Akasaki, J. Appl. Phys. 85 (1999) 7682.
15. G.B. Stringfellow, Organometallic Vapor-Phase Epitaxy: Theory and Practise, second ed, Academic Press, San Diego, 1999.