SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 473, Issue 1, 2005, Pages 169-175

Transformation of microcrystalline silicon films by excimer-laser-induced crystallization

(3) Hsieh, In Cha a Lien, Shui Yang b Wuu, Dong Sing b

a DA YEH UNIVERSITY (Taiwan)

b NATIONAL CHUNG HSING UNIVERSITY (Taiwan)

Author keywords

Atomic force microscopy; Laser irradiation; Silicon; Transmission electron microscopy

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTALLINE MATERIALS; CRYSTALLIZATION; ELLIPSOMETRY; EXCIMER LASERS; LASER BEAM EFFECTS; MICROSTRUCTURE; POLYSILICON; THIN FILM TRANSISTORS; TRANSMISSION ELECTRON MICROSCOPY;

EXCIMER-LASER-INDUCED CRYSTALLIZATION; LASER ENERGY; LASER IRRADIATED FILMS;

THIN FILMS;

EID: 9744246031 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2004.08.008 Document Type: Article

Times cited : (6)

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