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Volumn 198-200, Issue PART 2, 1996, Pages 923-926
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Correlation between structural, optical and electrical properties of μc-Si films
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Author keywords
[No Author keywords available]
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Indexed keywords
ABSORPTION SPECTROSCOPY;
AMORPHOUS SILICON;
CHEMICAL VAPOR DEPOSITION;
ELECTRIC PROPERTIES;
ELECTRON TRANSPORT PROPERTIES;
HYDROGENATION;
INFRARED SPECTROSCOPY;
LIGHT ABSORPTION;
LIGHT TRANSMISSION;
OPTICAL PROPERTIES;
REFLECTION;
STRUCTURE (COMPOSITION);
CARRIER TRANSPORT;
CRYSTALLINE VOLUME PARTS;
MICROCRYSTALLINE SILICON FILMS;
SCATTERING COEFFICIENT;
SUPERPOSITION;
AMORPHOUS FILMS;
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EID: 0030563302
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/0022-3093(96)00085-3 Document Type: Article |
Times cited : (17)
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References (12)
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