Evolution of Crystallinity in Mixed-Phase (a+μc)-Si:H as Determined by Real Time Spectroscopic Ellipsometry

Materials Research Society Symposium - Proceedings

Volumn 762, Issue , 2003, Pages 539-544

  Ferlauto, A S ^a   Ferreira, G M ^a   Koval, R J ^a   Pearce, J M ^a   Wronski, C R ^a   Collins, R W ^a   Al Jassim, M M ^b   Jones, K M ^b  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

^b NATIONAL RENEWABLE ENERGY LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER MOBILITY; COMPUTER SIMULATION; CRYSTAL GROWTH; CRYSTALLINE MATERIALS; ELLIPSOMETRY; NUCLEATION; OPTIMIZATION; PHASE DIAGRAMS; PHASE TRANSITIONS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON SOLAR CELLS; THIN FILMS; VOLUME FRACTION;

GAS FLOW RATES; REAL TIME SPECTROSCOPIC ELLIPSOMETRY (RTSE);

AMORPHOUS SILICON;

EID: 1642479934     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-762-a5.10     Document Type: Conference Paper

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