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Volumn 22, Issue 5, 2004, Pages 2380-2383

B diffusion in Si with pre-amorphization of different species

Author keywords

[No Author keywords available]

Indexed keywords

ANNIHILATION; END-OF-RANGE (EOR); PRE-AMORPHIZATION IMPLANTS (SPAI); TRANSIENT ENHANCED DIFFUSION (TED);

AMORPHIZATION; BONDING; DIFFUSION IN SOLIDS; ION IMPLANTATION; RAPID THERMAL ANNEALING; SEMICONDUCTOR JUNCTIONS; SILICON; SURFACE PHENOMENA;

BORON;

EID: 9744239547 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.1795250 Document Type: Article

Times cited : (4)

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