Parametric investigation of laser nanoimprinting of hemispherical cavity arrays

Journal of Applied Physics

Volumn 96, Issue 9, 2004, Pages 5144-5151

  Li, L P ^a   Lu, Y F ^a   Doerr, D W ^a   Alexander, D R ^a   Chen, X Y ^b  

^a UNIVERSITY OF NEBRASKA LINCOLN   (United States)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CAVITY STRUCTURE; HEMISPHERICAL CAVITY ARRAYS; LASER IMPRINTING; NANOIMPRINTING;

COMPUTER SIMULATION; EXCIMER LASERS; IRRADIATION; LASER APPLICATIONS; NANOTECHNOLOGY; PARTICLE SIZE ANALYSIS; SILICON; SUBSTRATES;

ARRAYS;

EID: 9744233647     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1796515     Document Type: Article

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