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Applied Physics A: Materials Science and Processing

Volumn 69, Issue 7, 1999, Pages

A comparison of ns and ps steam laser cleaning of Si surfaces

(8) Mosbacher, M a Chaoui, N b Siegel, J b Dobler, V a Solis, J b Boneberg, J a Afonso, C N b Leiderer, P a

a UNIVERSITY OF KONSTANZ (Germany)

b INSTITUTO DE ÓPTICA (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0042293510 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s003390051411 Document Type: Review

Times cited : (47)

References (18)

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