Visible light laser irradiation: A tool for implantation damage reduction

Materials Science Forum

Volumn 457-460, Issue II, 2004, Pages 941-944

  Camassel, J ^a   Peyre, H ^a   Brink, D J ^a,c   Zielinski, M ^a   Blanque S ^a,b   Mestres, N ^b   Godignon, P ^b  

^a UNIVERSITÉ MONTPELLIER 2   (France)

^b UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

^c UNIVERSITY OF PRETORIA   (South Africa)

Author keywords

6H SiC; Implantation damage; Nitrogen doping; Visible Light Laser Irradiation

Indexed keywords

ATOMIC FORCE MICROSCOPY; DOPING (ADDITIVES); LASER BEAM EFFECTS; NITROGEN; SILICON CARBIDE; ULTRAVIOLET RADIATION;

HIGH ENERGY LASER; SURFACE DAMAGE; THERMAL BUDGETS; VISIBLE LIGHT LASER IRRADIATION (VLLI);

ION IMPLANTATION;

EID: 8744305004     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.457-460.941     Document Type: Conference Paper

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