Infra-red reflectivity of ion-implanted and pulsed excimer laser irradiated 4H-SiC

Thin Solid Films

Volumn 364, Issue 1, 2000, Pages 200-203

  Key, P H ^a   Sands, D ^a   Schlaf, M ^a   Walton, C D ^a   Anthony, C J ^b   Brunson, K M ^b   Uren, M J ^b  

^a UNIVERSITY OF HULL   (United Kingdom)

^b DEFENCE SCIENCE AND TECHNOLOGY LABORATORY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EXCIMER LASERS; INFRARED SPECTROSCOPY; ION IMPLANTATION; PULSED LASER APPLICATIONS;

LASER IRRADIATION; REFLECTION SPECTROSCOPY;

SILICON CARBIDE;

EID: 0033905076     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00907-4     Document Type: Article

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