Optical defects in ion damaged 6H-silicon carbide

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 116, Issue 1-4, 1996, Pages 327-331

  Musumeci, P ^a   Calcagno, L ^a   Grimaldi, M G ^a   Foti, G ^a  

^a INFM   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHIZATION; CRYSTAL DEFECTS; ION IMPLANTATION; IONS; OPTICAL PROPERTIES; OPTICAL VARIABLES MEASUREMENT; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SINGLE CRYSTALS;

ABSORPTION COEFFICIENT; ELASTIC COLLISIONS; ENERGY THRESHOLD; OPTICAL DEFECTS;

SILICON CARBIDE;

EID: 0030218183     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(96)00067-5     Document Type: Article

References (18)

1. V.E. Chelnokov, Mater. Sci. Eng. B 11 (1992) 103.
2. K. Shnai, R.S. Scott and B.J. Baliga, IEEE Trans. Electron Devices 36 (1989) 1811.
3. J.A. Edmond, K. Das and R.F. Davis, J. Appl. Phys. 63 (1988) 922.
4. J.W. Polmour, H.S. Kong and R.F. Davis, Appl. Phys. Lett. 51 (1987) 2028.
5. J.A. Edmond, R.F. Davis, S.P. Withrow and K.L. More, J. Mater. Res. 3 (1988) 321.
6. R.R. Hart, H.L. Dunlap and O.J. Marsh, Radiat. Eff. 9 (1971) 261.
7. C.J. McHargue, P.S. Sklad and C.W. White, Nucl. Instr. and Meth. B 46 (1990) 79.
8. C.J. McHargue, G.C. Farlow, G.M. Begun, J.M. Williams, C.W. White, B.R. Appleton, P.S. Sklad and P. Angelini, Nucl. Instr. and Meth. B 16 (1986) 212.
9. C.J. McHargue and J.M. Williams, Nucl. Instr. and Meth. B 80/81 (1993) 889.
10. T. Nakata, Y. Mizutani, M. Mikoda, M. Watanabe, T. Takagi and S. Nishino, Nucl. Instr. and Meth. B 74 (1993) 131.
11. J.A. Spitznagel, S. Wood, W.J. Choyke, N.J. Doyle, J. Bradshaw and S.G. Fishman, Nucl. Instr. and Meth. B 16 (1986) 237.
12. J.M. Williams, C.J. McHargue and B.R. Appleton, Nucl. Instr. and Meth. 209/210 (1983) 317.
13. W. Wesch, A. Heft, E. Wendler, T. Bachmann and E. Glaser, Nucl. Instr. and Meth B 96 (1995) 335.
14. W. Wesch, E. Wendler and G. Gotz; Nucl. Instr. and Meth. B 22 (1987) 532.
15. L.C. Feldman and J.W. Mayer, Fundamentals of surface and thin film analysis (North-Holland, Amsterdam, 1984).
16. J.P. Biersack and L.G. Haggmark, Nucl. Instr. and Meth. 174 (1980) 257.
17. B. Monemar and J.M. Blum, J. Appl. Phy. 48 (1977) 1529.
18. G. Derst, C. Wilbertz, K.L. Bathia, W. Kratscmer and S. Kalbitzer, Appl. Phys. Lett. 54 (1989) 1722.