Patterning conductive copper by nanotransfer printing

Applied Physics Letters

Volumn 85, Issue 15, 2004, Pages 3316-3318

  Felmet, Kimberly ^a   Loo, Yueh Lin ^a   Sun, Yangming ^b  

^a The University of Texas at Austin   (United States)

^b University of Texas at Austin   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTIVE COPPER; NANOTRANSFER PRINTING; PATTERNING;

CHEMICAL POLISHING; CHEMICAL VAPOR DEPOSITION; CMOS INTEGRATED CIRCUITS; CONDUCTIVE MATERIALS; ETHANOL; PHOTOLITHOGRAPHY; PRESSURE EFFECTS; PRINTING;

COPPER;

EID: 8644277183     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1803916     Document Type: Article

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