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Volumn 85, Issue 15, 2004, Pages 3313-3315
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Leaky surface acoustic waves in Z-LiNbO 3 substrates with epitaxial AIN overlays
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTROMECHANICAL COUPLING;
LEAKY WAVES;
SURFACE ACOUSTIC WAVES (SAW);
TEMPERATURE STABILITY;
COMPUTER SIMULATION;
CRYSTALS;
LITHIUM COMPOUNDS;
PHOTOLITHOGRAPHY;
POLARIZATION;
THERMAL EFFECTS;
THICKNESS MEASUREMENT;
X RAY DIFFRACTION;
SURFACE WAVES;
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EID: 8644256787
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1805705 Document Type: Article |
Times cited : (12)
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References (16)
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