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Applied Physics A: Materials Science and Processing

Volumn 76, Issue 7, 2003, Pages 1125-1127

The characteristics of surface acoustic waves on AlN/LiNbO3 substrates

(4) Kao, K S a Cheng, C C b Chen, Y C a Lee, Y H a

a NATIONAL SUN YAT SEN UNIVERSITY (Taiwan)

b DE LIN INSTITUTE OF TECHNOLOGY (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ALUMINUM NITRIDE; LITHIUM NIOBATE; THERMODYNAMIC STABILITY; THIN FILMS;

MASS FLOW CONTROLLERS (MFC);

MATERIALS SCIENCE;

EID: 0038680597 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s00339-002-2022-3 Document Type: Article

Times cited : (19)

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